Fluid controller

ABSTRACT

A flow controller ( 1 ), comprising a valve body ( 4 ) having flow paths forming an inlet and an outlet of fluid, a diaphragm ( 6 ) held fixedly between the valve body and a bonnet ( 5 ), and an operating mechanism ( 7 ) moving the diaphragm vertically, wherein the valve body flow paths communicate with each other through a projection-free communication path ( 8 ), the a diaphragm is formed so that, when lowering, it comes into close contact with the communication path so that it closes the flow path and, when rising, the center part thereof is recessed so that an area near the outer peripheral part is raised, and a curved surface ( 52 ), to which the outer upper surface ( 63 ) of the raised part is closely fitted, is formed on a bonnet on the inner lower surface of a diaphragm holding part ( 51 ).

This application claims priority under 35 U.S.C. §365 to Internationalapplication PCT/JP99/07314 filed Dec. 24, 1999, which is incorporated byreference herein.

FIELD OF THE INVENTION

This invention is related to a fluid controller, and its object is toprovide the fluid controller that is superior in processability, whereofbranch plumbing is easy and puddle is hard to occur in flow paths, eventhe fluid controller is plumbed in inclined condition.

BACKGROUND ART

As a fluid controller used as usual, one with the structure shown inFIG. 23 is exemplified.

The fluid controller in FIG. 23 comprises a valve body C having an inletflow path A and an outlet flow path B, a diaphragm D, a bonnet E holdingfixedly periphery part of the diaphragm and an operation mechanism Gmoving the diaphragm in vertical direction, wherein the diaphragm D iscontacted and separated to a valve base F by operating operationmechanism G so that the inlet flow path A and the outlet flow path Bbecomes closure state or communication state.

In the conventional fluid controller as shown in FIG. 23, however, thecenter processing for a cave, i.e. the inlet flow path A, the outletflow path B and the valve body C must be accurate well adjusted whenprocessing the flow paths so that processability was very poor becausethe valve base F is provided as a protrusion between the inlet flow pathA and the outlet flow path B are curved and are opened at the surface ofvalve body C.

Also, there is a problem whereof the puddle of fluid is easy to occurinside the plumbing because flow paths are curved at the portion of thevalve base F.

Moreover, in case of using this branch type fluid controller havingvalve base F in plumbing, there are problems that setting space ofentire the plumbing becomes large because a body needs to be inclinedoblique direction to prevent occurring of puddle, and alsooperationality and maintenance-ability are bad because operatingmechanism inclines. As a new created technology to prevent puddle offluid into plumbing, there is the disclosed in Japan tokukaihei1-320378, for example.

The invention disclosed in Japan tokukaihei 1-320378 comprises that aninlet flow path and an outlet flow path which are arranged on theidentical axis line, these inlet flow path and outlet flow path areconnected with a communication path where it has no protrusion, whereina diaphragm is contacted and separated to the inside under thecommunication path.

Since the inlet flow path and the outlet flow path which are arranged onthe identical axis line are connected with the communication path whereit has no protrusion, this invention disclosed is superior in theprocessability of the flow path compared with a conventional fluidcontroller and moreover puddle of fluid inside of the plumbing is hardto occur because there is no curve on flow paths. However, whenadjusting to correspondence for the center of the diaphragm and a centerof width direction of communication flow path is not carried outaccurately, the flow path could not be surely closed down so that theaccurate adjusting work was required.

On the other hand, for plumbing such as a pipeline system, a T-lettershaped fluid controller showing in plan view having a main path and thebranch path at right angles to this main path is often used withconnecting the plumbing in order to sample fluid.

In the fluid controller having a conventional branch path, however, whenusing the branch path substantially horizontally and the main pathdownward, the puddle is occurred at the bump and it becomes the causesuch as propagation of the miscellaneous germs since bump exists oncommunication surface from the branch path to the seal base, so it isnot preferable.

For prior art invented in order to solve said problem, there is theinvention disclosed in Japan Patent No. 2591876 (PCT/GB91/01025).

The invention disclosed in Japan Patent No. 2591876 (PCT/GB91/01025)comprises a T-letter shaped fluid controller showing in plan view,wherein communication surface from the branch path to the seal basebecomes horizontal or inclined to the main path when directing thebranch path substantially horizontally and the main path downward

By the above invention, an occurrence of the puddle by the bump wasprevented since there is no bump which used to exist; however, theprocessability is very bad, and in actuality, it is difficult todisappear bump completely.

Therefore, in PCT/JP99/04544 as previously, the applicant provided afluid controller that was hard to occur puddle in flow path and superiorto processability.

FIG. 24 is a sectional view of the fluid controller that the applicantprovided, FIG. 25 is a plan view of a valve body of the fluid controllerand FIG. 26 is a sectional view for an A—A line in FIG. 25.

In the fluid controller, the inlet flow path and the outlet flow pathare connected with the communication path where it has no protrusion, itis hard to occur puddle in flow path, and it can independently be workedprocessing of the outlet flow path and center processing of the valvebody, hence the fluid controller is superior to processability.

Moreover, the fluid controller has a feature that by composing that theouter upper surface of the diaphragm protruded part fits closely to thecurved surface which is formed at the inner lower surface of a diaphragmholding part of the bonnet when the diaphragm rises, it is possibleadjusting to correspondence for the valve body and the bonnet easilyvery much with spending short time when producing, and it is hard tooccur gap when assembling.

However, in the fluid controller provided by the applicant, there is aproblem that puddle T of liquid occurs in a flow path when it is plumbedat a tilt as shown in FIG. 27.

This invention is for solving the above problem, and tries to providethe fluid controller which can prevent puddle at the minimum when it isinclined in plumbing and have excellent processability.

Disclosure of the invention

The invention relates to claim 1 is the fluid controller comprising: avalve body having inlet flow path and outlet flow path for fluid; adiaphragm held fixedly between the valve body and a bonnet; and anoperation mechanism moving the diaphragm in vertical direction, whereinsaid flow paths of the valve body communicate with each other through aprotrusion-free communication path, said diaphragm is fitted closely tothe communication path when lowered so as to close the flow path andwhen raised, the center part of the diaphragm is recessed and its partnear the outer periphery part is protruded, and a curved surface towhich an outer upper surface of said protruded part is closely fitted isformed on said bonnet at the inner lower surface of a diaphragm holdingpart, from upper surface, said valve body is disposed a hole on theinlet flow path thirled in the direction of inlet flow path and a holeon the outlet flow path thirled in the direction of inlet flow path, anda bottom face that is orthogonal with an inflow axis of said hole on theinlet flow path and/or a bottom face that is orthogonal with the inflowaxis of said hole on the outlet flow path are inclined downward towardto a bottom face of the inlet flow path and/or the outlet flow path.

The invention described in claim 2 relates to the fluid controller asclaimed in claim 1, wherein said inlet flow path and said outlet flowpath are comprised the inlet flow path and the outlet flow path whichare arranged on the identical axis line.

The invention described in claim 3 relates to the fluid controller asclaimed in claim 1, wherein said inlet flow path and said outlet flowpath are T-letter shaped flow paths comprising a penetration flow pathpenetrating the valve body and a branch flow path branched from thepenetration flow path and a bottom surface of the penetration flow pathexists at the same level as a bottom surface of the communication path.

The invention described in claim 4 relates to the fluid controller asclaimed in claim 1, wherein said inlet flow path and said outlet flowpath are T-letter shaped flow path comprising a penetration flow pathpenetrating the valve body and a branch flow path branched from thepenetration flow path, the penetration flow path is where a central axisline thereof is positioned below a bottom of said communication path,and a communication surface from the penetration flow path to thecommunication path is formed as an inclination horizontally or downwardwhen the penetration flow path is arranged horizontally and the branchflow path is arranged downward.

The invention described in claim 5 relates to the fluid controller asclaimed in claim 4, wherein the diameter of said penetration flow pathis larger than the diameter of the branch flow path.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing the 1st embodiment in the fluidcontroller related to the present invention, FIG. 2 is a side view ofthe fluid controller related to the 1st embodiment, FIG. 3 is a planview showing the 1st implementation form of the valve body of the fluidcontroller related to the 1st embodiment, FIG. 4 is a sectional view foran A—A line in FIG. 3, FIG. 5 is a sectional view for a B—B line in FIG.3, FIG. 6 is a sectional view for a C—C line in FIG. 3, FIG. 7 is asectional view for a D—D line in FIG. 3, FIG. 8 is a view showing thecase when the fluid controller related to the present invention is usedas a branch valve, FIG. 9 is a sectional view showing the 2nd embodimentof the fluid controller related to the present invention, FIG. 10 is aplan view of the valve body of the fluid controller related to the 2ndembodiment, FIG. 11 is a sectional view for an A—A line in FIG. 10, FIG.12 is a sectional view for a B—B line in FIG. 10, FIG. 13 is a sectionalview showing the 3rd embodiment of the fluid controller related to thepresent invention, FIG. 14 is a plan view of the valve body of the fluidcontroller related to the 3rd embodiment, FIG. 15 is a sectional viewfor an A—A line in FIG. 14, FIG. 16 is a sectional view showing the 4thembodiment of the fluid controller related to the present invention,FIG. 17 is a plan view of the valve body of the fluid controller relatedto the 4th embodiment, FIG. 18 is a sectional view for an A—A line inFIG. 17, FIG. 19 is a bottom plan view of the lower part of diaphragm inthe fluid controller related to the present invention, FIG. 20 is asectional view of the lower part of diaphragm, FIG. 21 is a sectionalview showing the condition whereof the diaphragm in the fluid controllerof the 1st embodiment is raised, FIG. 22 is a sectional view showinganother implementation form of the fluid controller related to thepresent invention, FIG. 23 is a sectional view showing an example of theconventional fluid controller, FIG. 24 is a sectional view showing thefluid controller new-created by the applicant before, FIG. 25 is a planview of the valve body of the fluid controller in FIG. 24, FIG. 26 is asectional view for an A—A line in FIG. 25, FIG. 27 is a view ofexplaining a problem of the fluid controller new-created by theapplicant before.

THE BEST EMBODIMENT FOR THE INVENTION

Hereinafter, preferable embodiments for the fluid controller related tothe present invention are explained based on the drawing.

FIG. 1 is a sectional view showing the 1st embodiment in the fluidcontroller related to the present invention and FIG. 2 is its side view.

The fluid controller 1 related to the 1st embodiment comprises: a valvebody 4 having a inlet flow path 2 and an outlet flow path 3; a diaphragm6 held fixedly between upper surface of the valve body 4 and the lowersurface of a bonnet 5; and an operation mechanism 7 moving the diaphragm6 in vertical direction.

The inlet flow path 2 and the outlet flow path 3 are arranged on theidentical axis line as shown in Figures, and the inlet flow path 2 andthe outlet flow path 3 communicate with each other through aprotrusion-free communication path 8.

In the fluid controller 1 related to the 1st embodiment, since the inletflow path 2 and the outlet flow path 3 communicate with each otherthrough the protrusion-free communication path 8 as the above, puddlenever occurs in the flow paths.

FIG. 3 is a plan view showing the valve body 4 of the fluid controller 1related to the 1st embodiment, FIG. 4 is a sectional view for an A—Aline in FIG. 3, FIG. 5 is a sectional view for a B—B line in FIG. 3,FIG. 6 is a sectional view for a C—C line in FIG. 3, FIG. 7 is asectional view for a D—D line in FIG. 3.

The valve body 4 is arranged the inlet flow path 2 and the outlet flowpath 3 on the identical axis line, and the inlet flow path 2 and outletflow path 3 communicate with each other through a protrusion-freecommunication path 8.

A hole on the inlet flow path side 91 is thirled from upper surface ofthe body in the direction of the inlet flow path 2, and a hole on theoutlet flow path side 92 is thirled as well as from upper surface of thebody in the direction of the outlet flow path 3.

This valve body 4 is superior in processability very much and branchplumbing is easy to be carried out since a processing for a cave, i.e.the inlet flow path 2 and outlet flow path 3 and a center processing forvalve body 4 can be worked independently.

The most feature of the fluid controller related to the presentinvention is as shown in FIG. 6 and FIG. 7 that a bottom face 91 a thatis orthogonal with flow path axis (a center axis of inlet flow path 2)of a hole on the inlet flow path 91 inclines downward in the directionof a bottom face 2 a of an inlet flow path 2 and a bottom face 92 a thatis orthogonal with the flow path (a center axis of outlet flow path 3)of a hole on the outlet flow path 92 inclines downward in the directionof a bottom face 3 a of an outlet flow path 3.

Then, these bottom face 91 a and 92 a of hole on the inlet flow path 91and hole on the outlet flow path 92 are in collinear and a side face tothe bottom face 91 a and 92 a of the hole on the inlet flow path 91 andthe hole on the outlet flow path 92 is almost perpendicular to a bottomface 2 a and 3 a of the inlet flow path 2 and the outlet flow path 3.

By this composition of the fluid controller related to the presentinvention, liquid in a flow path can achieve to the inlet flow path 2 orthe outlet flow path 3 with flowing along inclined the bottom face 91 aor the bottom face 92 a even if the fluid controller slightly inclineswhen it is plumbed, therefore, the fluid controller related to thepresent invention can prevent to occur puddle in inflow path.

In the present invention, angle of gradient (angle of gradient tohorizontal surface when upper surface of the valve body is arrangedhorizontally) of the bottom face 91 a and 92 a is not limitedparticularly, it is desirably a range of 20˜50 degrees. This is becauseif the angle of gradient is too small, when inclination of the fluidcontroller becomes slightly big, puddle occurs in the flow path theneffect is scanty, and it is not desirable. Incidentally, value of thisdesirable angle of gradient is as well as a bottom surface 93 a and 94 ain embodiments described later.

FIG. 8 is a view showing the case when the fluid controller 1 related tothe present invention is used as a branch valve. Incidentally, onlyvalve body 4 is shown in the Figure.

In the fluid controller 1 related to the present invention, since theinlet flow path 2 and the outlet flow path 3 are arranged on theidentical axis line and the inlet flow path 2 and the outlet flow path 3communicate with each other through a protrusion-free communication path8, the perpendicular plumbing without leaning a body is possible bypenetrating downward the inlet flow path side 91 or the hole on theoutlet flow path side 92 as it is and the horizontal plumbing withoutleaning a body is possible by penetrating the inlet flow path side 91 orthe hole on the outlet flow path side 92 horizontally as it is, as shownin Figure, so that it is superior in the weld work-ability on the branchplumbing, operationality of actuator and maintenance-ability.

Moreover, since the bottom face 91 a of the hole on the inlet flow pathside 91 and the bottom face 92 a of the hole on the outlet flow pathside 92 incline downward in the direction of the bottom face 2 a and 3 aof the inlet flow path 2 and the outlet flow path 3, in the case ofhorizontally or perpendicularly branch plumbing as these, occurring ofpuddle in the flow path can be prevented at the minimum, even if thevalve body which should be arranged in horizontally slightly inclines.

FIG. 9 is a sectional view showing the 2nd embodiment of the fluidcontroller related to the present invention, FIG. 10 is a plan view ofthe valve body of the fluid controller related to the 2nd embodiment,FIG. 11 is a sectional view for an A—A line in FIG. 10 and FIG. 12 is asectional view for an B—B line in FIG. 10.

The fluid controller 1 related to the 2nd embodiment comprises: a valvebody 4 having flow paths used as inlet and outlet for fluid; a diaphragm6 held fixedly between upper surface of the valve body 4 and the lowersurface of a bonnet 5; and an operation mechanism 7 moving the diaphragm6 in vertical direction.

The point that the fluid controller 1 related to the 2nd embodiment isdifferent from the 1st embodiment is that the inlet flow path and theoutlet flow path having a valve body 4 is a T-letter shaped flow pathcomprising a penetration flow path 12 penetrating the valve body 4 and abranch flow path 13 branched from said penetration flow path 12.

Further, the penetration flow path 12 and the branch flow path 13communicate with each other through the protrusion-free communicationpath 8, and occurrence of puddle in the flow paths is prevented.

Moreover, the inside diameter of the penetration flow path 12 and thebranch flow path 13 are the same diameter, and a bottom surface of thepenetration flow path 12 exists at the same level as a bottom surface ofthe communication path 8 as shown in FIG. 9. Also, the penetration flowpath 12 is provided as that the inside surface thereof on a side of thebranch flow path 13 is located to the position tilted a little in theopposite direction of the branch flow path 13 from the center of valvebody 4.

Incidentally, mark 93 in the Figure is a hole (referred to as a hole onthe outlet flow path) from the upper surface of the valve body 4 to thepenetration flow path 12, and mark 94 is a hole (referred to as a holeon the inlet flow path) from the upper surface of valve body 4 to thebranch flow path 13.

In the fluid controller 1 related to the 2nd embodiment, it is alsosuperior in processability very much since a processing for thepenetration flow path 12 and the branch flow path 13 and a centerprocessing for valve body 4 can be worked independently.

Further, in the fluid controller related to the 2nd embodiment as shownin FIG. 12, a bottom face 94 a that is orthogonal with flow path axis (acenter axis of inlet flow path 13) of a hole on the inlet flow path 94inclines downward in the direction of a bottom face 13 a of the centeraxis of inlet flow path 13.

Then, this bottom face 94 a of hole on the inlet flow path 94 is incollinear and a side face getting the bottom face 94 a of the hole onthe inlet flow path 94 is almost perpendicular to a bottom face 13 a ofthe center axis of inlet flow path 13.

Therefore, liquid in flow path can achieve to the center axis of inletflow path 13 with flowing along inclined the bottom face 94 a even ifthe fluid controller slightly inclines when it is plumbed, and it ishard to occur puddle in inflow path.

FIG. 13 is a sectional view showing the 3rd embodiment of the fluidcontroller related to the present invention, FIG. 14 is a plan view ofthe valve body of the fluid controller related to the 3rd embodiment andFIG. 15 is a sectional view for an A—A line in FIG. 14.

The fluid controller 1 related to the 3rd embodiment comprises: a valvebody 4 having flow paths used as inlet and outlet for fluid; a diaphragm6 held fixedly between upper surface of the valve body 4 and the lowersurface of a bonnet 5; and an operation mechanism 7 moving the diaphragm6 in vertical direction.

The fluid controller 1 related to the 3rd embodiment as same as the onein the 2nd embodiment, the flow path provided on a valve body 4, whichis the T-letter shaped flow path comprising a penetration flow path 12penetrating the valve body 4 and a branch flow path 13 branched fromsaid penetration flow path 12 and the branch flow path 13 communicatewith each other through a protrusion-free communication path 8.

The penetration flow path 12 is provided as that the inside surfacethereof on a side of the branch flow path 13 is located to the positiontilted a little in the opposite direction of the branch flow path 13from the center of valve body 4.

The difference points in the fluid controller 1 related to the 3rdembodiment from the one in the 2nd embodiment are that the diameter ofpenetration flow path 12 is about twice the large size of the diameterof branch flow path 13 and the penetration flow path 12 is where acentral axis line thereof is positioned below the bottom of thecommunication path 8.

A communication surface 14 from the penetration flow path 12 to thecommunication path 8 is formed as an inclination horizontally ordownward when the penetration flow path 12 is arranged horizontally andthe branch flow path 13 is arranged downward.

Therefore, with the composition whereof the penetration flow path 12 andthe branch flow path 13 communicate with each other through theprotrusion-free communication path 8, occurrence of puddle in the flowpaths is prevented completely when the penetration flow path 12 isarranged horizontally and the branch flow path 13 is arranged downward.

Incidentally, mark 93 in the Figure is a hole (referred to as hole onthe outlet flow path) from the upper surface of the valve body 4 to thepenetration flow path 12, and mark 94 is a hole (referred to as hole onthe inlet flow path) from the upper surface of valve body 4 to thebranch flow path 13.

In the fluid controller 1 related to the 3rd embodiment, it is alsosuperior in processability very much since a processing for thepenetration flow path 12 and the branch flow path 13 and a centerprocessing for valve body 4 can be worked independently.

Further, in the fluid controller related to the 3rd embodiment as shownin FIG. 15, the bottom face 94 a that is orthogonal with the flow path(a center axis of branch flow path 13) of a hole on the inlet flow path94 inclines downward in the direction of the bottom face 13 a of thecenter axis of branch flow path 13.

Then, this bottom face 94 a of hole on the inlet flow path 94 is incollinear and a side face to the bottom face 94 a of the hole on theinlet flow path 94 is almost perpendicular to the bottom face 13 a ofthe center axis of inlet flow path 13.

Therefore, liquid in a flow path can achieve to the center axis of inletflow path 13 with flowing along inclined the bottom face 94 a even ifthe fluid controller slightly inclines when it is plumbed, and it ishard to occur puddle in inflow path.

FIG. 16 is a sectional view showing the 4th embodiment of the fluidcontroller related to the present invention, FIG. 17 is a plan view ofthe valve body of the fluid controller related to the 4th embodiment andFIG. 18 is a sectional view for an A—A line in FIG. 17.

The fluid controller 1 related to the 4th embodiment comprises: a valvebody 4 having flow paths used as inlet and outlet for fluid; a diaphragm6 held fixedly between upper surface of the valve body 4 and the lowersurface of a bonnet 5; and an operation mechanism 7 moving the diaphragm6 in vertical direction.

The fluid controller 1 related to the 4th embodiment, as same as the onein the 2nd embodiment, the flow path provided on a valve body 4 is aT-letter shaped flow path comprising a penetration flow path 12penetrating the valve body 4 and a branch flow path 13 branched fromsaid penetration flow path 12, and the penetration flow path 12 and thebranch flow path 13 communicate with each other through aprotrusion-free communication path 8.

The penetration flow path 12 is provided as that the inside surfacethereof on a side of the branch flow path 13 is located to the positiontilted a little in the opposite direction of the branch flow path 13from the center of valve body 4.

The difference points in the fluid controller 1 related to the 4thembodiment from the one in the 2nd embodiment are that the diameter ofpenetration flow path 12 is about from four to five times the large sizeof the diameter of branch flow path 13 and the penetration flow path 12is where a central axis line thereof is positioned below the bottom ofthe communication path 8.

Communication surface 14 from the penetration flow path 12 to thecommunication path 8 is formed as an inclination horizontally ordownward when the penetration flow path 12 is arranged horizontally andthe branch flow path 13 is arranged downward, as same as the 3rdembodiment.

Also in the fluid controller 1 related to the 4th embodiment, therefore,with the composition whereof the penetration flow path 12 and the branchflow path 13 communicate with each other through the protrusion-freecommunication path 8, occurrence of puddle in the flow paths isprevented completely when the penetration flow path 12 is arrangedhorizontally and the branch flow path 13 is arranged downward.

Incidentally, mark 93 in the Figure is a hole (referred to as hole onthe outlet flow path) from the upper surface of the valve body 4 to thepenetration flow path 12, and mark 94 is a hole (referred to as hole onthe inlet flow path) from the upper surface of valve body 4 to thebranch flow path 13.

In the fluid controller 1 related to the 4th embodiment, it is alsosuperior in processability very much since a processing for thepenetration flow path 12 and the branch flow path 13 and a centerprocessing for valve body 4 can be worked independently.

Further, in the fluid controller related to the 4th embodiment as shownin FIG. 18, a bottom face 94 a that is orthogonal with the flow path (acenter axis of branch flow path 13) of a hole on the inlet flow path 94inclines downward in the direction of the bottom face 13 a of the centeraxis of the branch flow path 13.

Then, this bottom face 94 a of hole on the inlet flow path 94 is incollinear and a side face to the bottom face 94 a of the hole on theinlet flow path 94 is almost perpendicular to the bottom face 13 a ofthe center axis of the inlet flow path 13.

Therefore, liquid in flow path can achieve to the center axis of inletflow path 13 with flowing along inclined the bottom face 94 a even ifthe fluid controller slightly inclines when it is plumbed, and puddle ishard to occur in inflow path.

In the fluid controller 1 (from the 1st to the 4th embodiment) relatedto the present invention as described above, the diaphragm 6 have doublelayered structure comprised a lower part diaphragm 61 which a tip ofhanging lug 11 is buried and an upper part diaphragm 62 provided withsticking to an upper surface of the lower part diaphragm 61.

For the lower part diaphragm 61, a synthetic resin film made ofpolytetrafluoroethylene (PTFE) and the like is preferably used, and forthe upper part diaphragm 62, a rubber film made of synthetic rubber,such as natural rubber, nitrile rubber, styrene rubber, fluoric rubber(FPM), and ethylene propylene rubber (EPDM), is preferably used.

FIG. 19 is a bottom plan view of the lower part of diaphragm 61 and FIG.20 is a sectional view thereof.

As shown in Figures, annular ridges, which comprised outside annularridge 63 and inside annular ridge 64, near the periphery part of thelower part diaphragm 61 and longitudinal ridge 65 which runs the insideannular ridge 64 longitudinally are formed.

As shown in the FIG. 1 and the like, the outside annular ridge 63 playsa role to hold the lower part diaphragm 61 fixedly between the valvebody 4 and the bonnet 5, and the inside annular ridge 64 plays a role tohold the upper side diaphragm 62 fixedly at the place under the lowersurface of bonnet 5.

Moreover, the longitudinal ridge 65 plays a role whereof the lowersurface of lower part diaphragm 61 is fitted closely to thecommunication path 8 surely and the flow path is closed when diaphragm 6lowers.

The diaphragm 6, when it lowers, closes the flow path by fitting closelythe lower surface of lower part diaphragm 61 to the communication path 8as shown in FIG. 1.

Further, when diaphragm 6 rises to open the flow path, a center part ofthe diaphragm is recessed and its part near the outer periphery part isprotruded so that it shows as M-letter shape in a sectional view asshown in FIG. 9, FIG. 13, FIG. 16 and FIG. 21. At this time, an outerupper surface 63 of the diaphragm protruded part fits closely to acurved surface 52 that is formed at inner (a central axial direction)lower surface of a diaphragm holding part 51 of the bonnet 5.

As the above, by composing that the outer upper surface of the diaphragmprotruded part fits closely to the curved surface which is formed at theinner lower surface of a diaphragm holding part of the bonnet when thediaphragm rises, it is possible adjusting to correspondence for thevalve body 4 and the bonnet 5 easily very much with spending short timewhen producing, and it is hard to occur gap when assembling.

Incidentally, in the fluid controller 1 related to the presentinvention, the operation mechanism 7 moving diaphragm 6 in verticaldirection is not restricted especially, but it can be air pressureoperated system using a compressor as shown in FIG. 1 and manualoperated system as shown in FIG. 9 and FIG. 22. Also, other operatedsystem, which is well known, can be used appropriately.

The Availability on the Industry

As described above, the fluid controller related to the presentinvention can be preferably used for sampling plumbing at thecultivation equipment of the microorganism, supplying liquid plumbingand the like because puddle never occurs in the flow path and it issuperior in cleaning-ability in the pipe.

What is claimed is:
 1. The fluid controller, which is a fluid controller(1) comprising: a valve body (4) having flow paths used as inlet andoutlet for fluid; a diaphragm (6) held fixedly between the valve bodyand a bonnet (5); and an operation mechanism (7) moving the diaphragm invertical direction, wherein said flow paths of the valve bodycommunicate with each other through a protrusion-free communication path(8), said diaphragm is fitted closely to the communication path whenlowered so as to close the flow path and when raised, the center part ofthe diaphragm is recessed and its part near the outer periphery part isprotruded, a curved surface (52) to which an outer upper surface (63) ofsaid protruded part is closely fitted is formed on said bonnet at theinner lower surface of a diaphragm holding part (51), in said valvebody, from an upper surface, a hole on the inlet flow path (91,94)thirled toward to an inlet flow path and a hole on the outlet flow path(92, 93) thirled toward to an outlet flow path are provided, a bottomface (91 a, 94 a) that is orthogonal direction with an inflow axis ofsaid hole on the inlet flow path and/or a bottom face (92 a, 93 a) thatis orthogonal direction with an inflow axis of a hole on the outlet flowpath incline downward to a bottom face (2 a, 13 a) of said inlet flowpath and/or a bottom face (3 a, 12 a) of said outlet flow path, saiddiaphragm have double layered structure comprised a lower part diaphragm(61) and an upper part diaphragm (62), annular ridges, which comprisedoutside annular ridge (66) and inside annular ridge (64), near theperiphery part of the lower part diaphragm (61) is formed, and saidoutside annular ridge is projecting in vertical direction.
 2. The fluidcontroller described in claim 1, wherein said flow paths provided on thevalve body are comprised said inlet flow path (2) and said outlet flowpath (3) which are arranged on the identical axis line.
 3. The fluidcontroller described in claim 1, wherein said flow path provided on avalve body is a T-letter shaped flow path comprising a penetration flowpath (12) penetrating the valve body and a branch flow path (13)branched from the penetration flow path and a bottom surface of thepenetration flow path exists at the same level as a bottom surface ofthe communication path.
 4. The fluid controller described in claim 1,wherein said inlet flow path and said outlet flow path are a T-lettershaped flow path comprising a penetration flow path penetrating thevalve body and a branch flow path branched from the penetration flowpath, the penetration flow path is where a central axis line thereof ispositioned below a bottom of said communication path, and acommunication surface (14) from the penetration flow path to thecommunication path is formed as an inclination horizontally or downwardwhen the penetration flow path is arranged horizontally and the branchflow path is arranged downward.
 5. The fluid controller described inclaim 4, wherein the diameter of said penetration flow path is largerthan the diameter of the branch flow path.